@phdthesis{oai:kwansei.repo.nii.ac.jp:00026504, author = {芦田, 晃嗣 and Ashida, Koji}, month = {2018-02-15}, school = {関西学院大学}, title = {低速電子線チャネリング効果を用いたSiC結晶表面の終端構造評価}, year = {} }